Madou M.J. Fundamentals of Microfabrication and Nanotechnology. Volume I: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

3rd Edition. – Taylor & Francis Group, LLC, CRC Press, Boca Raton, FL, USA, 2011. – 646 p. – ISBN13: 978-1-4398-9534-4In Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nano technology we lay the foundations for a qualitative and quantitative theoretical understanding of micro- and nanoelectromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS, and NEMS, silicon (Si) is still the substrate and construction material of choice. A historical note about the ascent of silicon, MEMS and NEMS is the topic of Chapter 1. The necessary solid-state physics background to understanding the electronic, mechanical, and optical properties of solids relied on in ICs, MEMS and NEMS is covered in Chapters 2-5. In Chapter б we introduce fluidics, compare various fluidic propulsion mechanisms, and discuss the infuence of miniaturization on fluid behavior. Given the high level of interest, fluidics for miniaturized analytical equipment is covered in this chapter as well. Chapter 7 combines a treatise on electrochemical and optical analytical processes whose implementation is often attempted in miniaturized components and systems.
Note to the Reader: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology was originally composed as part of a larger book that has since been broken up into three separate volumes. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology represents the first volume in this set. The other two volumes include Manufacturing Techniques for Microfabrication and Nanotechnology and From MEMS to Bio-NEMS: Manufacturing Techniques and Applications. Cross-references to these books appear throughout the text and will be referred to as Volume II and Volume III, respectively. The interested reader is encouraged to consult these volumes as necessary.Introduction MEMS and NEMS Foundations
Historical Note: The Ascent of Silicon, MEMS, and NEMS
Crystallography
Quantum Mechanics and the Band Theory of Solids
Silicon Single Crystal is Still King
Photonics
Fluidics
Electrochemical and Optical Analytical Techniques