Czanderna A.W., Madey T.E., Powell C.J. (Eds.). Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis

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Kluwer, 2002, 451p.
Photon beam damage and charging at solid surfaces
Electron beam damage at solid surfaces
Ion beam bombardment effects on solid surfaces at energies used for sputter depth profiling
Characterization of surface topography
Depth profiling using sputtering methods