Gad-el-Hak M. (ed.) MEMS: Introduction and Fundamentals

Second edition. — CRC Press, 2006. — 488 p. — (Mechanical engineering series). — ISBN 978-0-8493-9137-8.As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.Scaling of Micromechanical Devices.
Mechanical Properties of MEMS Materials.
Flow Physics.
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains.
Molecular-Based Microfluidic Simulation Models.
Hydrodynamics of Small-Scale Internal Gaseous Flows.
Burnett Simulations of Flows in Microdevices.
Lattice Boltzmann Simulations of Slip Flows in Microchannels.
Lubrication in MEMS.
Physics of Thin Liquid Films.
Bubble/Drop Transport in Microchannels.
Fundamentals of Control Theory.
Model-Based Flow Control for Distributed Architectures.
Soft Computing in Control.The second volume of The MEMS Handbook, Second Edition - Gad-el-Hak M. (ed.) MEMS: Design and Fabrication, 2006