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Lin B.J. Optical Lithography: Here is Why

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Lin B.J. Optical Lithography: Here is Why
SPIE (Society of Photo-Optical Instrumentation Engineers), 2010. — 300 p. — (SPIE Press Monograph. Vol. PM190).
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future.
Topics include:
Exposure Systems.
Image Formation.
The Metrics of Lithography.
Components in Optical Lithography.
Processing and Optimization.
Immersion Lithography.
Outlook and Successors for Optical Lithography.
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