Jackson M.J. Microfabrication and Nanomanufacturing

CRC Press, Taylor & Francis Group, 2005, 387 pagesThe book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing.Micro- and Nanofabrication
Microfabrication Using X-Ray Lithography.
Etching, Machining, and Molding High-Aspect Ratio Microstructures
The Size Effect in Micromachining
Mechanical Micromachining
Precision Micro- and Nanogrinding
CVD Diamond Technology for Microtools, NEMS, and MEMS Applications
Laser-Based Micro- and Nanofabrication
Pulsed Water Drop Micromachining
Diamond Nanogrinding
Nanometric Machining: Theory, Methods, and Implementation