El-Kareh B. Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

Springer, 2009. - 614 p. - Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions. The book is compiled from the author’s industrial and academic lecture notes and reflects years of experience in the development of silicon devices.List of Symbols
Silicon
Junctions and Contacts
The Bipolar Transistor
The MOS Structure
Insulated-Gate Field-Effect Transistor
Analog Devices and Passive Components
Enabling Processes and Integration
Applications
Appendix. Universal Physical Constants
Appendix. International System of Units, SI
Appendix. The Greek Alphabet
Appendix. Properties of Silicon and Germanium (300 K, Intrinsic Semiconductor Unless Otherwise Stated)
Appendix. Conversion Factors