Ostrikov K., Xu S. Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly

Wiley, 2007. — 316 p.
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.What Makes Low-Temperature Plasmas a Versatile Nanotool?
Specific Examples and Practical Framework
Generation of Building andWorking Units
Transport, Manipulation, and Deposition of Building and Working Units
Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes
Ion-Focusing Nanoscale Objects
Building and Working Units at Work: Applications in Nanoscale Materials Synthesis and Processing
Conclusions and Outlook
Appendix. Reactions and Rate Coefficients in Low-Temperature PECVD of Carbon Nanostructures
Appendix. Why plasma-based nanoassembly: many more reasons